| Title | Self Adjustment of Scanning Electron Microscopes / Selbstadaptivität von Rasterelektronenmikroskopen |
| Publication Type | Journal Article |
| Year of Publication | 2009 |
| Authors | Staudacher, M, Hamprecht, FA, Görlitz, L |
| Journal | Patent, Patent Number WO2009062781A1 |
| Citation Key | staudacher_09_selbstadaptivitaet |
